Open AccessInfluence of the Inert Gas Pressure on Intrinsic Stress in Diamond-Like Coating Deposited From Vacuum Arc Carbon Plasma
Author(s) -
A. I. Kalinichenko,
V.E. Strel’nitskij
Publication year - 2022
Publication title -
east european journal of physics
Language(s) - English
Resource type - Journals
eISSN - 2312-4539
pISSN - 2312-4334
DOI - 10.26565/2312-4334-2022-2-01
Subject(s) - argon , diamond like carbon , coating , inert gas , ion , materials science , stress (linguistics) , plasma , carbon fibers , atmospheric pressure plasma , ionization , analytical chemistry (journal) , chemistry , atomic physics , composite material , thin film , nanotechnology , linguistics , philosophy , physics , organic chemistry , chromatography , quantum mechanics , composite number