Open AccessPolymers and Cold Plasmas
Author(s) -
P. Gröning,
Martine Collaud Coen,
L. Schlapbach
Publication year - 2001
Publication title -
chimia
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.387
H-Index - 55
eISSN - 2673-2424
pISSN - 0009-4293
DOI - 10.2533/chimia.2001.171
Subject(s) - microelectronics , polymer , plasma , plasma processing , materials science , surface energy , nanotechnology , surface modification , plasma cleaning , plasma polymerization , fluorine , ceramic , chemical engineering , polymerization , composite material , metallurgy , physics , quantum mechanics , engineering