Open AccessThe effect of microstructure and surface roughness on the electrical conductivity of thin copper and silver films obtained by the method of magnetron sputtering
Author(s) -
D. A. Polonyankin,
А. И. Блесман,
D. V. Postnikov
Publication year - 2017
Publication title -
dinamika sistem, mehanizmov i mašin
Language(s) - English
Resource type - Journals
ISSN - 2310-9793
DOI - 10.25206/2310-9793-2017-5-2-204-208
Subject(s) - copper , microstructure , materials science , surface roughness , electrical resistivity and conductivity , sputter deposition , metallurgy , thin film , conductivity , surface finish , cavity magnetron , sputtering , composite material , nanotechnology , chemistry , electrical engineering , engineering