Open AccessThe influence of technological parameters of deposition of multi-element ion-plasma coatings on its quality
Author(s) -
Е. Н. Еремин,
V.М. Yurov,
V.Ch. Laurynas,
A. Sh. Syzdykova
Publication year - 2019
Publication title -
omskij naučnyj vestnik
Language(s) - English
Resource type - Journals
eISSN - 2541-7541
pISSN - 1813-8225
DOI - 10.25206/1813-8225-2019-166-9-13
Subject(s) - deposition (geology) , plasma , materials science , quality (philosophy) , element (criminal law) , ion , engineering physics , chemistry , engineering , physics , geology , political science , nuclear physics , paleontology , organic chemistry , quantum mechanics , sediment , law