Open AccessContact resistivity measurement of silicide ohmic contacts to silicon p-type by Transmission Line Method
Author(s) -
Р. Б. Бурлаков
Publication year - 2018
Publication title -
omskij naučnyj vestnik
Language(s) - English
Resource type - Journals
eISSN - 2541-7541
pISSN - 1813-8225
DOI - 10.25206/1813-8225-2018-162-169-173
Subject(s) - ohmic contact , electrical resistivity and conductivity , materials science , silicide , silicon , transmission line , line (geometry) , optoelectronics , electrical engineering , nanotechnology , engineering , mathematics , geometry , layer (electronics)