Open AccessAnalysis of Changes in the Elemental Impurity Composition in the Silica Nanopowder Synthesis by Electron Beam Evaporation
Author(s) -
D. Yu. Trufanov,
A. P. Zavjalov,
К. V. Zobov,
В. В. Сызранцев,
С. П. Бардаханов
Publication year - 2018
Publication title -
sibirskij fizičeskij žurnal
Language(s) - English
Resource type - Journals
ISSN - 2541-9447
DOI - 10.25205/2541-9447-2018-13-2-53-60
Subject(s) - impurity , evaporation , materials science , cathode ray , composition (language) , electron beam physical vapor deposition , nanoparticle , chemical engineering , elemental analysis , beam (structure) , electron , analytical chemistry (journal) , nanotechnology , optics , chemistry , environmental chemistry , inorganic chemistry , thin film , physics , organic chemistry , nuclear physics , thermodynamics , linguistics , philosophy , engineering