Open AccessElectromigration Effect on Silicon (001) Surface under Homoepitaxy Conditions
Author(s) -
E. E. Rodyakina,
S. V. Sitnikov,
А. В. Латышев
Publication year - 2017
Publication title -
sibirskij fizičeskij žurnal
Language(s) - English
Resource type - Journals
ISSN - 2541-9447
DOI - 10.25205/2541-9447-2017-12-4-73-78
Subject(s) - electromigration , materials science , silicon , optoelectronics , nanotechnology , engineering physics , composite material , engineering