Open AccessSputtering Deposition of Ferroelectric Thin Films and Heterostructures
Author(s) -
Pedro Prieto,
W. Lopera
Publication year - 2011
Publication title -
revista de ciencias (on line)/revista de ciencias
Language(s) - English
Resource type - Journals
eISSN - 2248-4000
pISSN - 0121-1935
DOI - 10.25100/rc.v11i0.533
Subject(s) - heterojunction , sputtering , materials science , ferroelectricity , thin film , deposition (geology) , optoelectronics , sputter deposition , nanotechnology , geology , dielectric , paleontology , sediment
Sputtering Deposition of Ferroelectric Thin Films and Heterostructures