Open AccessInfluence of Cylindrical Electrode Configuration on Plasma Parameters in a Sputtering System
Author(s) -
Alaa Khamees Bard,
Qusay Adnan Abbas
Publication year - 2022
Publication title -
iraqi journal of science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.152
H-Index - 4
eISSN - 2312-1637
pISSN - 0067-2904
DOI - 10.24996/ijs.2022.63.8.17
Subject(s) - argon , atomic physics , plasma , electron density , electron temperature , debye length , plasma parameter , sputtering , plasma parameters , electron , chemistry , torr , electrode , glow discharge , materials science , analytical chemistry (journal) , thin film , physics , quantum mechanics , chromatography , thermodynamics , nanotechnology