Open AccessVibrational Characteristics Modeling of a PZT5A Mems Resonator Disc Metallized with Alternating Electrical Source
Author(s) -
I. Naciri,
Tjprc
Publication year - 2018
Publication title -
international journal of mechanical and production engineering research and development
Language(s) - English
Resource type - Journals
eISSN - 2249-6890
pISSN - 2249-8001
DOI - 10.24247/ijmperdapr2018163
Subject(s) - microelectromechanical systems , resonator , materials science , alternating current , optoelectronics , acoustics , electrical engineering , engineering , physics , voltage