Open AccessVibrational Characteristics Modeling of a PZT5A Mems Resonator Disc Metallized with Alternating Electrical Source
Author(s) -
Ismail Naciri,
A. Rguiti,
L. Elmaimouni,
J.E. Lefebvre,
Y. Belkassmi,
F. E. Ratolojanahary
Publication year - 2018
Publication title -
international journal of mechanical and production engineering research and development
Language(s) - English
Resource type - Journals
eISSN - 2249-6890
pISSN - 2249-8001
DOI - 10.24247/ijmperdapr2018163
Subject(s) - microelectromechanical systems , resonator , materials science , alternating current , optoelectronics , acoustics , electrical engineering , engineering , physics , voltage
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