Open AccessThe Effect of Spin Coating Speed and deposition parameters on the Crystalline Size of ZnO Thin Films
Author(s) -
Aqeel Ali Al-Attar,
Safaa Mohammad Hasony,
Ali Hussein Ali
Publication year - 2013
Publication title -
mağallaẗ diyālá li-l-ʿulūm al-handasiyyaẗ/mağallaẗ diyālá li-l-ʻulūm al-handasiyyaẗ
Language(s) - English
Resource type - Journals
eISSN - 2616-6909
pISSN - 1999-8716
DOI - 10.24237/djes.2013.06407
Subject(s) - thin film , spin coating , materials science , sol gel , deposition (geology) , coating , zinc , particle size , semiconductor , chemical engineering , composite material , nanotechnology , optoelectronics , metallurgy , paleontology , sediment , engineering , biology
ZnO thin films have been deposited onto the glass-substrates by the sol-gel spin coating method at different chuck rotation rates. This method was used for the preparation of thin films on the important semiconductors ІІ-VІ. The effect of deposition parameters on the structural, optical and electrical properties of the ZnO thin film was investigated. Zinc acetate dehydrate, 2- methoxethanol and monoethanolamine (MEA) were used as a starting material, solvent and stabilizer, respectively. XRD of the dried gel showed that weight loss continued until 300°C, with smallest particle size at 400 rpm spin coating speed.