Open AccessPOLY HARMONIC MONITORING OF THIN FILM THICKNESS
Author(s) -
T. R. Sakhbiev,
Oleg G. Morozov,
Ilnur I. Nureev,
А. Ж. Сахабутдинов,
D.I. Kasimova
Publication year - 2017
Publication title -
naučno-tehničeskij vestnik povolžʹâ
Language(s) - English
Resource type - Journals
ISSN - 2079-5920
DOI - 10.24153/2079-5920-2017-7-2-53-55
Subject(s) - materials science , thin film , harmonic , composite material , physics , acoustics , nanotechnology