Open AccessKinetic Monte Carlo Study of Low Pressure Chemical Vapor Deposition SiNx Thin Films Deposit Phase
Author(s) -
Adil Bouhadiche
Publication year - 2021
Publication title -
nanomedicine and nanotechnology open access
Language(s) - English
Resource type - Journals
ISSN - 2574-187X
DOI - 10.23880/nnoa-16000210
Subject(s) - materials science , chemical vapor deposition , monte carlo method , deposition (geology) , thin film , kinetic monte carlo , phase (matter) , combustion chemical vapor deposition , chemical engineering , analytical chemistry (journal) , nanotechnology , carbon film , chemistry , chromatography , engineering , geology , organic chemistry , mathematics , paleontology , statistics , sediment