
GaN/AlInN/AlN/Safir HEMT Yapılar için Mozaik Kusur ve AFM Çalışması
Author(s) -
Ahmet Kürşat Bilgili,
Erkan Hekin,
Mustafa Kemal Öztürk,
Süleyman Özçelik,
Ekmel Özbay
Publication year - 2022
Publication title -
politeknik dergisi
Language(s) - English
Resource type - Journals
eISSN - 2147-9429
pISSN - 1302-0900
DOI - 10.2339/politeknik.787700
Subject(s) - materials science , crystallite , epitaxy , high electron mobility transistor , atomic force microscopy , diffraction , crystallography , wide bandgap semiconductor , x ray crystallography , optoelectronics , optics , layer (electronics) , chemistry , nanotechnology , transistor , metallurgy , physics , voltage , quantum mechanics