Open AccessMosaic Defects of AlN Buffer Layers in GaN/AlN/4H-SiC Epitaxial Structure
Author(s) -
Tuğçe Ataşer,
D. Demir,
Ahmet Kürşat Bilgili,
Mustafa Kemal Öztürk,
Süleyman Özçelik
Publication year - 2021
Publication title -
politeknik dergisi
Language(s) - English
Resource type - Journals
eISSN - 2147-9429
pISSN - 1302-0900
DOI - 10.2339/politeknik.682649
Subject(s) - materials science , metalorganic vapour phase epitaxy , buffer (optical fiber) , layer (electronics) , x ray reflectivity , mosaicity , chemical vapor deposition , epitaxy , substrate (aquarium) , optoelectronics , surface finish , dislocation , thin film , composite material , nanotechnology , telecommunications , oceanography , geology , computer science