Open AccessYüzey Si ve GaAs Tek Kristallerinin Düşük Sıcaklıklı Vakum-Termal Temizliği Yöntemi
Author(s) -
Gunel Imanova
Publication year - 2022
Publication title -
politeknik dergisi
Language(s) - Turkish
Resource type - Journals
eISSN - 2147-9429
pISSN - 1302-0900
DOI - 10.2339/politeknik.1119884
Subject(s) - impurity , analytical chemistry (journal) , annealing (glass) , materials science , ion , etching (microfabrication) , chemistry , metallurgy , nanotechnology , chromatography , organic chemistry , layer (electronics)