Open AccessAerosol deposition of Ba0.8Sr0.2TiO3 thin films
Author(s) -
Zorica Branković,
Goran Branković,
Aleksandar Tucić,
Aleksandar Radojković,
Elson Longo,
José Arana Varela
Publication year - 2009
Publication title -
science of sintering/science of sintering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.309
H-Index - 25
eISSN - 1820-7413
pISSN - 0350-820X
DOI - 10.2298/sos0903303b
Subject(s) - materials science , deposition (geology) , thin film , grain size , substrate (aquarium) , homogeneous , chemical engineering , surface roughness , titanium , analytical chemistry (journal) , mineralogy , metallurgy , nanotechnology , composite material , chemistry , chromatography , paleontology , oceanography , sediment , geology , engineering , biology , physics , thermodynamics
In this work we optimized conditions for aerosol deposition of homogeneous, nanograined, smooth Ba0.8Sr0.2TiO3 thin films. Investigation involved optimization of deposition parameters, namely deposition time and temperature for different substrates. Solutions were prepared from titanium isopropoxide, strontium acetate and barium acetate. Films were deposited on Si (1 0 0) or Si covered by platinum (Pt (1 1 1) /Ti/SiO2/Si). Investigation showed that the best films were obtained at substrate temperature of 85ºC. After deposition films were slowly heated up to 650ºC, annealed for 30 min, and slowly cooled. Grain size of BST films deposited on Si substrate were in the range 40-70 nm, depending on deposition conditions, while the same films deposited on Pt substrates showed mean grain size in the range 35-50 nm. Films deposited under optimal conditions were very homogeneous, crackfree, and smooth with rms roughness lower than 4 nm for both substrates