Open AccessSimulation of radiation effects in ultra-thin insulating layers
Author(s) -
Ljubinko Timotijević,
Miloš Vujisić,
Koviljka Stanković
Publication year - 2013
Publication title -
nuclear technology and radiation protection
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.31
H-Index - 16
eISSN - 1452-8185
pISSN - 1451-3994
DOI - 10.2298/ntrp1303308t
Subject(s) - materials science , polycarbonate , charged particle , alpha particle , ionizing radiation , silicon dioxide , ion , monte carlo method , silicon nitride , radiation , silicon , thin layers , irradiation , atomic physics , optoelectronics , composite material , optics , nuclear physics , physics , statistics , mathematics , quantum mechanics
The Monte Carlo simulations of charged particle transport are used to investigate the effects of exposing ultra-thin layers of insulators (commonly used in integrated circuits) to beams of protons, alpha particles and heavy ions. Materials considered include silicon dioxide, aluminum nitride, alumina, and polycarbonate - lexan. The parameters that have been varied in simulations include the energy of incident charged particles and insulating layer thickness. Materials are compared according to both ionizing and non-ionizing effects produced by the passage of radiation. [Projekat Ministarstva nauke Republike Srbije, br. 171007