Open AccessSimulation of radiation effects in ultra-thin insulating layers
Author(s) -
Ljubinko Timotijević,
Miloš Vujisić,
Koviljka Stanković
Publication year - 2013
Publication title -
nuclear technology and radiation protection
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.31
H-Index - 16
eISSN - 1452-8185
pISSN - 1451-3994
DOI - 10.2298/ntrp1303308t
Subject(s) - polycarbonate , materials science , charged particle , alpha particle , ionizing radiation , silicon dioxide , ion , silicon nitride , monte carlo method , silicon , radiation , thin layers , radiation damage , nitride , particle (ecology) , irradiation , layer (electronics) , optoelectronics , atomic physics , composite material , optics , nuclear physics , physics , statistics , mathematics , quantum mechanics , oceanography , geology
The Monte Carlo simulations of charged particle transport are used to investigate the effects of exposing ultra-thin layers of insulators (commonly used in integrated circuits) to beams of protons, alpha particles and heavy ions. Materials considered include silicon dioxide, aluminum nitride, alumina, and polycarbonate - lexan. The parameters that have been varied in simulations include the energy of incident charged particles and insulating layer thickness. Materials are compared according to both ionizing and non-ionizing effects produced by the passage of radiation. [Projekat Ministarstva nauke Republike Srbije, br. 171007