Open AccessSynthesis of thin films by the pyrosol process
Author(s) -
Aleksandar Tucić,
Goran Branković,
Zorica V. Marinković,
Lidija Mančić,
Olivera Milošević
Publication year - 2002
Publication title -
hemijska industrija
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.147
H-Index - 19
eISSN - 2217-7426
pISSN - 0367-598X
DOI - 10.2298/hemind0209375t
Subject(s) - thin film , substrate (aquarium) , deposition (geology) , process (computing) , materials science , aerosol , nanotechnology , process engineering , simplicity , chemical engineering , computer science , chemistry , organic chemistry , engineering , physics , paleontology , oceanography , sediment , biology , geology , operating system , quantum mechanics
Among many aerosol routes, the Pyrosol process, due to its simplicity, low cost and quality of obtained films, represents a promising technique for the synthesis of thin films. The pyrosol process is based on the transport and pyrolysls of an aerosol of processor solution, generated in an ultrasonic atomizer, on a heated substrate. The theoretical principles of the pyrosol process are presented in this paper, as well as the influence of some synthesis parameters on the deposition of SnO2 thin films