Open AccessFunctionalization of low-k surfaces with low-energy Ar ions
Author(s) -
A. A. Solovykh,
A. A. Sycheva,
Е. Н. Воронина
Publication year - 2022
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/tpl.2022.04.53162.19085
Subject(s) - surface modification , ion , low energy , materials science , diffusion , atom (system on chip) , ab initio , work (physics) , dielectric , density functional theory , irradiation , atomic physics , chemical physics , computational chemistry , chemistry , thermodynamics , optoelectronics , physics , computer science , organic chemistry , nuclear physics , embedded system