Open AccessPlasmachemical etching in postgrowth technology of photovoltaic converters
Author(s) -
A. V. Malevskaya,
Yu. M. Zadiranov,
N. D. Il’inskaya,
D. A. Malevskiy,
P. V. Pokrovskiy
Publication year - 2022
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.297
H-Index - 34
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/tp.2022.04.53608.282-21
Subject(s) - photovoltaic system , materials science , etching (microfabrication) , fabrication , optoelectronics , converters , heterojunction , isotropic etching , layer (electronics) , voltage , nanotechnology , electrical engineering , engineering , medicine , alternative medicine , pathology