Open AccessComparative study of the thermal stability of Be-based extremeultraviolet pellicles
Author(s) -
Zuev S. Yu.,
Lopatin A. Ya.,
V. I. Luchin,
N. N. Salashchenko,
D. A. Tatarskiy,
N. N. Tsybin,
Н. И. Чхало
Publication year - 2022
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.297
H-Index - 34
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/tp.2022.01.52535.197-21
Subject(s) - materials science , thermal stability , annealing (glass) , thin film , monolayer , composite material , wavelength , optoelectronics , transmission electron microscopy , beryllium , nitride , crystallinity , optics , nanotechnology , layer (electronics) , chemical engineering , chemistry , physics , organic chemistry , engineering