Open AccessВзаимодействие молекулярных ионов кислорода с поверхностью меди: особенности энергетических спектров распыленных и обратнорассеянных ионов
Author(s) -
A. Tolstogouzov,
С.И. Гусев,
D.J. Fu
Publication year - 2022
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2022.07.52294.19088
Subject(s) - ion , atomic physics , crystallite , spectral line , materials science , sputtering , chemistry , physics , thin film , nanotechnology , metallurgy , organic chemistry , astronomy
An experimental study on the energy spectra of ions emitted from the surface of a polycrystalline Cu target under the bombardment by 2 keV O2+ molecular ions was carried out. Sputtered atomic ions Cu+ and O+ were prevailed among the positively charged secondary ions, and among the negative ions, in addition to sputtered ions Cu-, CuO2-, O-, and O2-, intense elastically and inelastically backscattered O- and O2+ ions were revealed.