Open AccessСубволновые текстурированные поверхности для вывода излучения из волновода
Author(s) -
Г.В. Вознюк,
Ilya Grigorenko,
М. И. Митрофанов,
В. В. Николаев,
V. P. Evtikhiev
Publication year - 2022
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2022.06.52214.19103
Subject(s) - lithography , materials science , template , etching (microfabrication) , electron beam lithography , x ray lithography , next generation lithography , optoelectronics , optics , scanning electron microscope , nanotechnology , resist , physics , composite material , layer (electronics)
A technology for creating textured surfaces by focused-beam ion-beam etching on GaAs (100) substrates is demonstrated. The possibility of flexible control of the shape and profile of the formed submicron elements of textured media is shown. It will make possible to create textured surfaces of almost any complexity for the implementation of surface output of radiation from a waveguide. Original lithographic templates were developed and three-dimensional lithography was carried out. The control of the formed lithographic patterns was carried out by the methods of optical, electron and atomic force microscopy.