Open AccessНанесение аморфного металлического покрытия на полые стеклянные микросферы
Author(s) -
А.Ф. Паль,
А.Н. Рябинкин,
А.О. Серов
Publication year - 2022
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2022.06.52212.19120
Subject(s) - materials science , amorphous solid , sputter deposition , surface roughness , deposition (geology) , sputtering , thin film , amorphous metal , composite material , surface finish , cavity magnetron , metallurgy , nanotechnology , crystallography , alloy , chemistry , paleontology , sediment , biology
Amorphous metal Pt – Zr coatings of micron thick as well as crystalline ones were obtained on the surface of hollow thin-wall glass microspheres using direct current magnetron sputtering at the deposition rate of 0.1 nm/s. Being in the range of 1–2 nm, the roughness of the obtained amorphous coatings is essentially lower than that of crystalline coatings of the same composition.