Open AccessМеталл-стимулированное разложение поверхности сапфира в потоке электронов с энергией 70 keV
Author(s) -
В.П. Власов,
А.Э. Муслимов,
В.М. Каневский
Publication year - 2021
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2021.20.51608.18858
Subject(s) - sapphire , materials science , decomposition , electron , substrate (aquarium) , metal , etching (microfabrication) , flux (metallurgy) , molecular physics , atomic physics , chemistry , nanotechnology , optics , metallurgy , physics , nuclear physics , laser , oceanography , organic chemistry , layer (electronics) , geology
Metal-stimulated decomposition of sapphire surface at room temperaturein a flux of electrons with energy of 70 keV. The stimulant used is an ensemble of crystallineislands of gold. It was first established that the presence of an ensemble of gold islands on the surface of sapphiresignificantly reduces substrate temperature and electron energy at which decomposition occurssurfaces. Etching pits form near gold islands and have an elongated shape withthe following dimensions: length up to 1.2 μm, width up to 0.8 μm and average depth 20 nm. Maximum areathe base of the islands increases from 0.6 to 1.8 μm2.