Лазерное травление германия | Zendy

В.Ю. Железнов | Zendy; Т.В. Малинский | Zendy; С.И. Миколуцкий | Zendy; В.Е. Рогалин | Zendy; С.А. Филин | Zendy; Ю.В. Хомич | Zendy; В.А. Ямщиков | Zendy; И. А. Каплунов | Zendy; А.И. Иванова | Zendy

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Лазерное травление германия

Author(s) -

В.Ю. Железнов,

Т.В. Малинский,

С.И. Миколуцкий,

В.Е. Рогалин,

С.А. Филин,

Ю.В. Хомич,

В.А. Ямщиков,

И. А. Каплунов,

А.И. Иванова

Publication year - 2021

Publication title -

письма в журнал технической физики

Language(s) - English

Resource type - Journals

eISSN - 1726-7471

pISSN - 0320-0116

DOI - 10.21883/pjtf.2021.14.51181.18724

Subject(s) - materials science , impact crater , laser , etching (microfabrication) , germanium , ultraviolet , nucleation , crystal (programming language) , radiation , ablation , optics , laser ablation , irradiation , optoelectronics , chemistry , nanotechnology , silicon , physics , organic chemistry , engineering , layer (electronics) , astronomy , aerospace engineering , computer science , nuclear physics , programming language

When studying the scanning of the polished surface of germanium single crystals by focused pulse-frequency radiation of an ultraviolet Nd:YAG laser, it was found that at subthreshold energy densities (at E ͠͠ 0.5–1.15 J/cm2), in the absence of noticeable traces of crater formation, laser etching was observed. It is assumed that the centers of ablation nucleation are dislocations coming out on the crystal surface.

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