Open AccessЛазерное травление германия
Author(s) -
В.Ю. Железнов,
Т.В. Малинский,
С.И. Миколуцкий,
В.Е. Рогалин,
С.А. Филин,
Ю.В. Хомич,
В.А. Ямщиков,
И.А. Каплунов,
А.И. Иванова
Publication year - 2021
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2021.14.51181.18724
Subject(s) - materials science , impact crater , laser , etching (microfabrication) , germanium , ultraviolet , nucleation , crystal (programming language) , radiation , ablation , optics , laser ablation , irradiation , optoelectronics , chemistry , nanotechnology , silicon , physics , organic chemistry , engineering , layer (electronics) , astronomy , aerospace engineering , computer science , nuclear physics , programming language
When studying the scanning of the polished surface of germanium single crystals by focused pulse-frequency radiation of an ultraviolet Nd:YAG laser, it was found that at subthreshold energy densities (at E ͠͠ 0.5–1.15 J/cm2), in the absence of noticeable traces of crater formation, laser etching was observed. It is assumed that the centers of ablation nucleation are dislocations coming out on the crystal surface.