Open AccessИсследование механических свойств эпитаксиальных слоев метастабильных alpha- и ε-фаз Ga-=SUB=-2-=/SUB=-O-=SUB=-3-=/SUB=- методом наноиндентирования
Author(s) -
L. I. Guzilova,
А. С. Гращенко,
P. N. Butenko,
А.В. Чикиряка,
A. I. Pechnikov,
В. И. Николаев
Publication year - 2021
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2021.14.51177.18751
Subject(s) - nanoindentation , crystallography , materials science , fracture (geology) , epitaxy , modulus , alpha (finance) , composite material , analytical chemistry (journal) , chemistry , mathematics , construct validity , statistics , layer (electronics) , chromatography , psychometrics
The deformation and fracture resistance of α- and ε(κ)-Ga2O3 epitaxial layers grown on Al2O3 substrates were investigated by the nanoindentation technique. The calculated values of hardness H and Young modulus E are 18.7 and 283.4 GPa, and 17.5 and 256.1 GPa for α- and ε(κ)-Ga2O3 respectively. It was found that the fracture resistanse Klc is ~ 0.67 MPa·m1/2 for ε(κ)-Ga2O3, and 0.70 for α-Ga2O3.