Open AccessФормирование сверхтвердых покрытий в процессе обработки низкотемпературной плазмой азота в открытой атмосфере пленок титана
Author(s) -
М.Х. Гаджиев,
Р.М. Эмиров,
А.Э. Муслимов,
М.Г. Исмаилов,
В.М. Каневский
Publication year - 2021
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2021.09.50908.18701
Subject(s) - rutile , materials science , nitriding , coating , indentation hardness , nitrogen , titanium , sapphire , plasma , hardening (computing) , metallurgy , chemical engineering , composite material , layer (electronics) , microstructure , chemistry , optics , laser , physics , organic chemistry , quantum mechanics , engineering
Results of the formation of superhard coatings in the low-temperature nitrogen plasma treatment process in the open atmosphere of titanium films on sapphire substrates are given. It is shown that during plasma treatment a coating of nitrogen-containing TiO2 with rutile structure is formed with a double increase (in comparison with rutile TiO2) of microhardness (up to 27 GPa). The application of this coating leads to hardening of the surface of sapphire plates by 22-23%. High productivity and implementation of synthesis in an open atmosphere make it possible to consider the proposed procedure is promising for the production of superhard coatings with high resistance to oxygen.