Open AccessЭнергетические распределения вторичных заряженных частиц при распылении газовыми кластерными ионами
Author(s) -
А.Е. Иешкин,
А.А. Татаринцев,
Д.С. Киреев,
В.И. Бачурин,
А.С. Рудый
Publication year - 2021
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2021.08.50849.18657
Subject(s) - argon , xenon , atomic physics , cluster (spacecraft) , spectral line , ion , irradiation , sputtering , charged particle , copper , chemistry , materials science , physics , nuclear physics , thin film , nanotechnology , metallurgy , organic chemistry , astronomy , computer science , programming language
We present an experimental investigation of the energy spectra of the charged particles emitted from polycrystalline copper under argon and xenon cluster ion irradiation. Positive secondary particles have significantly lower energies than in the case of sputtering with atomic argon. The spectra of the charged particles emitted under xenon cluster bombardment are systematically narrower than the corresponding ones obtained under argon cluster bombardment. The observed regularities can be explained in terms of energy transfer form a cluster to the target.