Open AccessРазработка системы низкопрофильного дефлектометра комбинированных систем сканирующей зондовой и оптической микроскопии
Author(s) -
А.В. Мезин,
А.Е. Ефимов,
Д.О. Соловьева,
И.С. Васкан,
В.А. Олейников,
К.Е. Мочалов
Publication year - 2021
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2021.06.50753.18577
Subject(s) - optics , materials science , scanning probe microscopy , nanotechnology , physics
A system of a low-profile SPM-deflectometer (SPM - scanning probe microscopy) which makes it possible to increase the aperture of the supplied objectives to the currently record value NA = 0.75 has been developed, manufactured and tested. The introduction of such a system will significantly improve the performance of optical techniques for combined SPM / optical microspectroscopy systems.