Open AccessВлияние пористости слоя кремния на упругие свойства гибридных подложек SiC/Si
Author(s) -
А.А. Корякин,
Ю.А. Еремеев,
А. В. Осипов,
С.А. Кукушкин
Publication year - 2021
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2021.03.50571.18579
Subject(s) - nanoindentation , materials science , elastic modulus , silicon , composite material , modulus , porosity , layer (electronics) , work (physics) , finite element method , porous silicon , young's modulus , silicon carbide , crystallography , structural engineering , thermodynamics , metallurgy , chemistry , physics , engineering
In this work, the influence of porosity of silicon layer with macropores on elastic and thermomechanical properties of SiC/Si substrates synthesized by the atom substitution method has been studied. Calculation of elastic constants of porous silicon has been performed by the finite element method. The results of calculation of the Young’s modulus in [111] direction are in agreement with the estimates obtained by the nanoindentation method of SiC/Si(111) substrates. The proposed theoretical model can be used for determination of elastic properties of SiC/Si substrates of different orientation.