Open AccessИсследование индуктивно-связанной плазмы пониженного давления CF-=SUB=-3-=/SUB=-Br методами зонда Ленгмюра и оптической эмиссионной спектроскопии
Author(s) -
В.О. Кузьменко,
А.В. Мяконьких
Publication year - 2021
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2021.02.50548.18578
Subject(s) - langmuir probe , bromine , plasma , inductively coupled plasma , ion , electron , radical , dielectric , analytical chemistry (journal) , electron temperature , fluorine , chemistry , plasma diagnostics , actinometer , materials science , environmental chemistry , organic chemistry , physics , optoelectronics , quantum mechanics
The parameters of the inductively coupled low pressure CF3Br plasma were measured by the Langmuir probe and actinometry. The electron temperature and concentrations of electrons and positive ions, as well as fluorine and bromine radicals, have been determined. An explanation is proposed for the previously observed significant degradation of low-k dielectrics during etching in the studied plasma.