Open AccessВыглаживание поверхности антимонида галлия
Author(s) -
Р.В. Левин,
И.В. Федоров,
А.С. Власов,
П.Н. Брунков,
Б.В. Пушный
Publication year - 2020
Publication title -
žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-748X
pISSN - 0044-4642
DOI - 10.21883/pjtf.2020.23.50350.17971
Subject(s) - annealing (glass) , materials science , surface roughness , surface finish , analytical chemistry (journal) , composite material , chemistry , chromatography
For the first time, the results of a study of the conditions for obtaining an atomically smooth surface of GaSb substrates are presented. It is shown experimentally that it is possible to improve the surface quality of the samples by changing the annealing conditions. The lowest obtained roughness of 1.27 nm was obtained at an annealing time of 16 minutes at a temperature of 650°C in the flow of TMSb and H2.