Open AccessВлияние температуры мишени на образование нанорельефа при облучении газовыми кластерными ионами
Author(s) -
Д.С. Киреев,
А.Е. Иешкин,
А. А. Шемухин
Publication year - 2020
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2020.09.49362.18021
Subject(s) - fluence , surface roughness , materials science , cluster (spacecraft) , surface finish , ion , copper , ion beam , oblique case , beam (structure) , chemical physics , optics , mineralogy , chemistry , physics , composite material , metallurgy , computer science , linguistics , philosophy , organic chemistry , programming language
A study of the nanorelief formed on the surface of copper under the influence of an oblique beam of cluster ions at various fluences and target temperatures was carried out. The resulting nanorelief develops into an ordered wave-like structure with increasing fluence. It was found that with an increase in the target temperature, the initial roughness is smoothed. The mechanisms responsible for the formation of surface topography are indicated, and estimates of their effectiveness are made.