Open AccessАнализ углеродсодержащих материалов методом вторично-ионной масс-спектрометрии: содержание атомов углерода в sp-=SUP=-2-=/SUP=-- и sp-=SUP=-3-=/SUP=--гибридных состояниях
Author(s) -
М.Н. Дроздов,
Ю Н Дроздов,
А.И. Охапкин,
П.А. Юнин,
О.А. Стрелецкий,
А.Е. Иешкин
Publication year - 2020
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2020.06.49164.18151
Subject(s) - carbon fibers , ion , analytical chemistry (journal) , silicon , diamond , mass spectrum , chemistry , spectral line , mass spectrometry , cluster (spacecraft) , secondary ion mass spectrometry , calibration , atomic physics , materials science , physics , organic chemistry , chromatography , astronomy , composite number , computer science , composite material , programming language , quantum mechanics
A new approach to the analysis of carbon-containing materials by the method of secondary ion mass spectrometry is studied, which allows one to determine the concentration of carbon atoms in the states of sp2 and sp3 hybridization. It is proposed to use the ratio of the intensities of cluster secondary ions C8/C7 as the main parameter of the mass spectra of secondary ions characterizing the concentration of N(sp3). From measurements of several test structures, a calibration dependence of N (sp3) on the C8/C7 ratio was obtained. The N(sp3) profiles of diamond-like carbon samples grown on diamond and silicon substrates were measured, showing an N(sp3) concentration of 0.3 to 0.6 for different growth modes and an inhomogeneous distribution of the N(sp3) concentration over the thickness of the samples.