Open AccessСтруктура и сегнетоэлектрические свойства гетероэпитаксиальных тонких пленок NaNbO-=SUB=-3-=/SUB=-, полученных методом RF-катодного распыления
Author(s) -
А. В. Павленко,
Д.В. Стрюков,
Н.В. Тер-Оганесян
Publication year - 2020
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2020.02.48945.18046
Subject(s) - tetragonal crystal system , materials science , piezoelectricity , dielectric , diffraction , sputtering , ferroelectricity , thin film , substrate (aquarium) , lattice (music) , crystallography , analytical chemistry (journal) , crystal structure , optoelectronics , nanotechnology , optics , chemistry , composite material , physics , oceanography , chromatography , geology , acoustics
For the first time, thin films of NaNbO3 on a MgO(001) substrate, on which a SrRuO3 layer was previously deposited, were obtained by RF cathode sputtering in an oxygen atmosphere. According to x-ray diffraction analysis the films are single phase and single-crystalline. The lattice parameters in the tetragonal approximation for the NaNbO3 and SrRuO3 layers were: с(NaNbO3) = 0.3940(1) nm, a(NaNbO3) = 0.389(1) nm; с(SrRuO3) = 0.4004(1) nm, a(SrRuO3) = 0.392(3) nm. The unit cell deformation for NaNbO3 was ε33 = 0.007, ε11 = 0.002. Dielectric and piezoelectric measurements indicate that the films are in a ferroelectric state.