Open AccessДеформация элементарной ячейки при прерывистом напылении пленок ниобата бария-стронция
Author(s) -
Д.В. Стрюков,
А.В. Павленко
Publication year - 2019
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2019.23.48714.17988
Subject(s) - materials science , layer (electronics) , epitaxy , sputtering , cathode , composite material , optoelectronics , thin film , nanotechnology , electrical engineering , engineering
The epitaxial Sr0.5Ba0.5Nb2O6/MgO thin films with different layer thickness, but the same total thickness have been fabricated by RF-cathode sputtering. It has been determined that layer thickness decreasement leads to an increase in the unit cell strain, which is maintained if the thickness of the subsequent layers does not exceed the critical.