Open AccessОсобенности структуры и свойств тонких пленок цирконата-титаната свинца с сильно неоднородным распределением состава по толщине
Author(s) -
Д.М. Долгинцев,
М.В. Старицын,
В.П. Пронин,
Е.Ю. Каптелов,
С.В. Сенкевич,
И.П. Пронин,
С.А. Немов
Publication year - 2019
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2019.16.48156.17873
Subject(s) - materials science , perovskite (structure) , bilayer , deposition (geology) , crystallization , thin film , lead zirconate titanate , dielectric , phase (matter) , sputter deposition , cavity magnetron , layer (electronics) , mineralogy , ferroelectricity , chemical engineering , composite material , nanotechnology , optoelectronics , sputtering , chemistry , geology , paleontology , biochemistry , organic chemistry , membrane , sediment , engineering
Two-layer thin lead zirconate titanate films in which the lead content differed by 20% were formed by radio-frequency magnetron deposition under variation of the working gas pressure. A comparative study of the phase state, composition, and dielectric properties of bilayer structures differing in the sequence of layers deposition has been carried out. It is shown that, depending on the order of the layers, the conditions of crystallization of the perovskite phase and the unipolar properties of the films change significantly.