Open AccessОценка толщины тонких пленок на основе данных элементного состава пленочных структур
Author(s) -
Ю.М. Николаенко,
А.С. Корнеевец,
Н.Б. Эфрос,
В.В. Бурховецкий,
И.Ю. Решидова
Publication year - 2019
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2019.13.47958.17743
Subject(s) - materials science , substrate (aquarium) , contrast (vision) , scanning electron microscope , energy (signal processing) , spectrometer , cationic polymerization , analytical chemistry (journal) , electron microscope , optics , chemistry , physics , mathematics , statistics , chromatography , geology , composite material , oceanography , polymer chemistry
The possibility of quantitative estimation of the film thickness using cationic composition data, obtained by the INCA Energy-350 energy dispersive spectrometer which is integrated in electron microscope the JSM-6490 LV has been revealed. The application of this method is especially important in the case when the SEM image has insufficient contrast between of the film and substrate regions.