Open AccessИсследование многослойных тонкопленочных структур методом резерфордовского обратного рассеяния
Author(s) -
В.И. Бачурин,
Н.С. Мелесов,
E. O. Parshin,
А.С. Рудый,
А.Б. Чурилов
Publication year - 2019
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2019.12.47914.17798
Subject(s) - rutherford backscattering spectrometry , nanometre , materials science , measure (data warehouse) , analytical chemistry (journal) , nanotechnology , chemistry , thin film , composite material , computer science , data mining , chromatography
The results of the study of the possibilities of the Rutherford backscattering spectrometry (RBS) for analysis of a multilayer structure containing nanometer scale layers with elements of similar masses are presented. It is shown that RBS allows to measure the composition of such structures, as well as the film thickness as a whole and the thickness of individual layers with a sufficiently high accuracy, and can be used as an input control of technological structures used in micro- and nanotechnologies.