Open AccessХарактеризация свойств пленок титаната бария-стронция и управляемых элементов на их основе в диапазоне частот 1-60 GHz
Author(s) -
А.Г. Алтынников,
А.Г. Гагарин,
А.В. Тумаркин,
И.В. Котельников
Publication year - 2019
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2019.11.47816.17777
Subject(s) - capacitor , materials science , ferroelectricity , dielectric , optoelectronics , resonator , semiconductor , millimeter , dielectric resonator , optics , electrical engineering , voltage , physics , engineering
The electrical properties of the tunable capacitors based on the barium-strontium titanate films and the films itself were investigated in a wide frequency range. The dielectric losses of ferroelectric films at frequencies up to 30 GHz were estimated based on the parameters of capacitors. The measurements were performed using the set of resonance techniques. Direct measurements of the film properties were carried out at a frequency of 60 GHz using the open resonator technique. The parameters of the capacitors were compared with semiconductor analogs to demonstrate the prospects of thin-film ferroelectric elements application in the millimeter wavelength range.