Open AccessОсобенности импульсного лазерного отжига пленок ВС-=SUB=-3-=/SUB=- на сапфировой подложке
Author(s) -
В.Ю. Фоминский,
Р.И. Романов,
A.A. Соловьев,
И.С. Васильевский,
Д.А. Сафонов,
А.А. Иванов,
П.В. Зинин,
В.П. Филоненко
Publication year - 2019
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2019.09.47709.17722
Subject(s) - materials science , irradiation , amorphous solid , microstructure , boron carbide , sheet resistance , morphology (biology) , fluence , pulsed laser deposition , thin film , substrate (aquarium) , graphite , sapphire , carbide , boron , analytical chemistry (journal) , composite material , laser , crystallography , nanotechnology , optics , chemistry , physics , oceanography , organic chemistry , layer (electronics) , chromatography , biology , geology , nuclear physics , genetics
The morphology, chemical composition, microstructure and electrical properties of BC3 thin films subjected to melting by a nanosecond laser pulse were investigated. The original films were formed by pulsed laser co-deposition of B and C on a sapphire substrate at 150 and 350 °C. Morphological changes in the films depended on their initial structure. However, the structure “frozen” after irradiation in both films was attributed to the B-saturated graphite-like phase, the local composition of which varied due to the formation of inclusions of amorphous boron carbide. Before and after irradiation, the films showed a weakly decreasing dependence of the sheet resistance with increasing temperature from 4.2 to 330 K. After pulsed laser irradiation, the sheet resistance of the films decreased by ~ 2.6 times.