Open AccessИсследование состава и фазового состояния тонких пленок цирконата-титаната свинца, полученных высокочастотным магнетронным осаждением, при изменении давления рабочего газа
Author(s) -
Д.М. Долгинцев,
В.П. Пронин,
Е.Ю. Каптелов,
С.В. Сенкевич,
И.П. Пронин
Publication year - 2019
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2019.06.47488.17628
Subject(s) - pyrochlore , materials science , stoichiometry , perovskite (structure) , annealing (glass) , lead zirconate titanate , lead titanate , sputter deposition , lead oxide , lead (geology) , mineralogy , thin film , ferroelectricity , phase (matter) , sputtering , analytical chemistry (journal) , metallurgy , chemical engineering , nanotechnology , dielectric , chemistry , optoelectronics , environmental chemistry , geology , organic chemistry , geomorphology , engineering
Variation of the working gas pressure (from 8 to 2 Pa) during RF magnetron sputtering deposition of thin perovskite lead zirconate titanate (PZT) films revealed strong changes in their lead content, which decreased below the stoichiometric level and led to the formation of a two-phase (perovskite–pyrochlore) structure upon subsequent high-temperature annealing. Measurements of the composition of perovskite islands in the two-phase films showed that the lead content in these islands was equal to or greater than stoichiometric. These results lead to the conclusion that the obtained PZT films are free of lead vacancies.