Open AccessСегнетоэлектрические пленки титаната-цирконата бария на сапфировых подложках
Author(s) -
А.В. Тумаркин,
М.В. Злыгостов,
А.Г. Гагарин,
Е.Н. Сапего
Publication year - 2018
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2018.23.47011.17476
Subject(s) - materials science , sapphire , dielectric , lead zirconate titanate , thin film , capacitive sensing , substrate (aquarium) , composite material , platinum , optoelectronics , ferroelectricity , nanotechnology , optics , electrical engineering , laser , chemistry , biochemistry , oceanography , physics , engineering , geology , catalysis
The structural and electrical physical properties of barium titanate zirconate thin films on pure sapphire substrates and sapphire substrates with a platinum sublayer are investigated. The nature of substrate is shown to have a considerable effect on the crystal structure, phase composition, and electrical parameters of the prepared thin films. Capacitive elements fabricated using barium zirconate titanate films display high nonlinearity at low dielectric losses, as measured at a frequency of 2 GHz.