Open AccessДиэлектрические потери в MPCVD-алмазах в полосах частот 25-30 и 250-350 GHz в зависимости от параметров процесса роста
Author(s) -
B.M. Garin,
В.В. Паршин,
Е. А. Серов,
A. D. Nikolenko,
Я Ц Лю,
М Х Дин,
Тан В. Чж.
Publication year - 2018
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2018.21.46850.17307
Subject(s) - diamond , microwave , analytical chemistry (journal) , series (stratigraphy) , materials science , substrate (aquarium) , dielectric , optoelectronics , chemistry , engineering , geology , composite material , telecommunications , environmental chemistry , paleontology , oceanography
A complex systematic study of the effect of various parameters of the CVD diamond growth in a microwave plasma (MPCVD diamonds), such as substrate temperature, the chemical composition of a gas mixture, etc., on dielectric losses in two frequency bands (25–30 and 250–350 GHz) for more than ten samples of various series is carried out. A correlation between the values of the losses in these two frequency bands is identified.