Open AccessОсобенности наноструктурирования поверхности кремния в результате ее сверхбыстрого нагрева фемтосекундным лазерным импульсом в воде
Author(s) -
С.А. Ромашевский
Publication year - 2018
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2018.14.46345.17271
Subject(s) - materials science , fluence , nanoscopic scale , femtosecond , atomic force microscopy , silicon , morphology (biology) , ablation , optoelectronics , nanostructure , laser ablation , surface (topology) , laser , nanotechnology , optics , geometry , physics , engineering , mathematics , aerospace engineering , biology , genetics
ilicon surface morphology induced by a femtosecond laser pulse at near-threshold fluences in water environment is investigated by means of atomic-force microscopy (AFM). With increasing fluence, the silicon surface transforms into nanoscale ring-shaped and blister structures, as well as smooth and nanostructured microcraters with a minimum depth of 1 nm. The formation of starlike patterns imprinted at the surface of microcraters at fluences above the ablation threshold is observed.