Open AccessВлияние дипольной поляризации эмитирующей поверхности на пороги автоэмиссии многоострийных кремниевых катодных матриц
Author(s) -
Р.К. Яфаров
Publication year - 2018
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2018.13.46329.17313
Subject(s) - materials science , silicon , wafer , field electron emission , cathode , electric field , plasma , electron , dipole , optoelectronics , polarization (electrochemistry) , coating , nanotechnology , chemistry , physics , organic chemistry , quantum mechanics
Regularities of changes in the structural-phase composition and morphological and field-emission characteristics of surface-structured silicon wafers with various types of conductivity have been studied. It is shown that the use of a fluorocarbon plasma in the process of structuring, along with a carbon mask coating, allows obtaining preset autoemission currents of silicon cathode matrices when the external electric-field strength varies in a wide range irrespectively of the change of the gain factors of the fields of the emitting protrusions. The dominant role of dipole polarization in autoemission of electrons in surface-modified silicon structures has been established.