Open Access
Синтез высокоориентированных пленок оксида цинка на аморфных подложках методом магнетронного распыления на постоянном токе
Письма В Журнал Технической ФизикиPeer ReviewedА. М. Исмаилов +42018Journals
We describe the technology of obtaining highly oriented zinc-oxide (ZnO) films on amorphous substrates at high growth rates (up to 7 nm/s) by means of direct-current magnetron sputtering. It is suggested to optimize the substrate position with respect to magnetron and consider the floating potential to which the substrate is charged in magnetron discharge plasma as one of the main technological parameters. Electrondiffraction study of the structural characteristics of the obtained ZnO films showed that increase in the substrate temperature was accompanied by transformation of the crystallite shape from platelike to columnar.

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