Open AccessУпругое рассеяние атомных пар Mo-Mo, Mo-S и S-S в диапазоне относительных кинетических энергий 2-200 eV
Author(s) -
А.П. Палов
Publication year - 2018
Publication title -
pisʹma v žurnal tehničeskoj fiziki
Language(s) - English
Resource type - Journals
eISSN - 1726-7471
pISSN - 0320-0116
DOI - 10.21883/pjtf.2018.10.46101.17243
Subject(s) - nanoelectronics , binary number , kinetic energy , sputtering , atomic physics , range (aeronautics) , materials science , photonics , nanometre , phase (matter) , perspective (graphical) , molecular dynamics , physics , nanotechnology , optoelectronics , quantum mechanics , thin film , computer science , arithmetic , mathematics , artificial intelligence , composite material
The interatomic binary potentials of Mo-Mo, Mo-S and S-S, approved by Molecular Dynamics, were used to calculate elastic phase shifts and cross sections of the atomic pairs in the relative kinetic energy range of 2–200 eV. It is expected the obtained differential and integral cross sections to be of help to describe sputtering of MoS_2 nanometer layers in design of perspective devices of nanoelectronics and photonics.